Actuation of Flexible Membranes via Capillary Force: Single-Active-Surface Experiments
نویسندگان
چکیده
منابع مشابه
Capillary Force Actuation: A Mechatronic Perspective
Capillary force actuation is a new technology holding particular promise for microelectromechanical systems. Relying upon the ability of electrical fields to alter the capillary pressure in a liquid, this technology permits larger actuation forces and strokes than conventional microactuators. Herein, the physical principles of electrowetting are discussed along with the relationships between ch...
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Elastomeric materials offer many benefits to MEMS, including smaller device footprints, greater range of motion, and lower required actuation forces. Capillary forces are a novel and promising mechanism to produce motion in the flexible components of micro devices that contain them. Through the phenomenon of electrowetting these forces can be actively controlled, offering a unique capability to...
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Design considerations and experiments have been made for obtaining a new type of active microvalves using silicon buckled membranes. The properties of the buckled membranes permitting to obtain high deflections and to actuate them more convenient are demonstrated. A thermal actuation using an aluminium ring layer heated with a polysilicon resistor is analysed. The polysilicon and the aluminium ...
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Photothermal cantilever excitation provides a fast and easy to implement means to control the deflection of standard atomic force microscopy cantilevers. Minute heat pulses yield deflections on the order of several tens of nanometers or when the deflection is kept constant, forces of several hundreds of piconewton can be applied. In our case these pulses resulted in less than 1 K temperature ch...
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We present a capillary flow system for liquid transport in microsystems. Our simple microfluidic system consists of two planar parallel surfaces, separated by spacers. One of the surfaces is entirely hydrophobic, the other mainly hydrophobic, but with hydrophilic pathways defined on it by photolithographic means. By controlling the wetting properties of the surfaces in this manner, the liquid c...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2018
ISSN: 2072-666X
DOI: 10.3390/mi9110545